Design And Modeling Of Miniature On-chip Spiral Inductor For Dc-dc Converter

In this paper, we study the effect of the technological parameters of on chip inductor, the characteristics of on chip inductor is simulated using the MATLAB simulation. All of inductor is fabricated in the standard silicon process with metal layers. The simulated results are accurate only when technological parameters used in ensemble, such as the metal conductivity, metal thickness, oxide thickness between the top metal and the substrate, and substrate conductivity on inductance, quality factor and self-resonant frequency